Spatially resolved in situ diagnostics for plasma-enhanced chemical vapor deposition film growth

McCauley, Thomas S.; Israel, Andrew; Vohra, Yogesh K.; Tarvin, John T.
April 1997
Review of Scientific Instruments;Apr97, Vol. 68 Issue 4, p1860
Academic Journal
Presents a micro-optical system design which can perform spatially resolved in situ spectroscopic measurements of both local substrate temperature and gas-phase species concentrations/distributions in real time. Gas-phase diagnostics; Optical probes for temperature measurement; Determination of optical transfer function.


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