Design and performance study of a scanning magnetron sputtering target

Panwar, N.S.; Vargheese, K. Deenamma; Mohan, G.
April 1997
Review of Scientific Instruments;Apr97, Vol. 68 Issue 4, p1858
Academic Journal
Describes the design and performance of a scanning magnetron sputtering system to study target utilization, substrate temperature and film uniformity. Scanning of the magnetic field on the target surface; Target utilization efficiency; Target-substrate distance; Value of sputtering pressure.


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