TITLE

Design and performance study of a scanning magnetron sputtering target

AUTHOR(S)
Panwar, N.S.; Vargheese, K. Deenamma; Mohan, G.
PUB. DATE
April 1997
SOURCE
Review of Scientific Instruments;Apr97, Vol. 68 Issue 4, p1858
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the design and performance of a scanning magnetron sputtering system to study target utilization, substrate temperature and film uniformity. Scanning of the magnetic field on the target surface; Target utilization efficiency; Target-substrate distance; Value of sputtering pressure.
ACCESSION #
4321267

 

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