New method of calculating the correction factors for the measurement of sheet resistivity of a

Junsheng Shi; Yicai Sun
April 1997
Review of Scientific Instruments;Apr97, Vol. 68 Issue 4, p1814
Academic Journal
Calculates the correction factors for the measurement of sheet resistivity of a square sample with square four-point probe using the finite element method. Measurement principle; Advantages of using the method.


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