TITLE

New method of calculating the correction factors for the measurement of sheet resistivity of a

AUTHOR(S)
Junsheng Shi; Yicai Sun
PUB. DATE
April 1997
SOURCE
Review of Scientific Instruments;Apr97, Vol. 68 Issue 4, p1814
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Calculates the correction factors for the measurement of sheet resistivity of a square sample with square four-point probe using the finite element method. Measurement principle; Advantages of using the method.
ACCESSION #
4321258

 

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