TITLE

A four-point surface conductivity probe suitable for in situ ultrahigh vacuum conductivity

AUTHOR(S)
Wiegenstein, Christopher G.; Schulz, Kirk H.
PUB. DATE
April 1997
SOURCE
Review of Scientific Instruments;Apr97, Vol. 68 Issue 4, p1812
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes a simple design for a four-point probe for precision surface conductivity measurements. Design components; Suitability of the instrument in ultrahigh vacuum applications; Measurement of the conductivity of a doped silicon wafer.
ACCESSION #
4321257

 

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