A versatile stable scanning proximal probe microscope

Jahncke, C.L.; Hallen, H.D.
April 1997
Review of Scientific Instruments;Apr97, Vol. 68 Issue 4, p1759
Academic Journal
Presents a novel scanning proximal probe microscope design utilizing a piezoelectric driven coarse positioning mechanism in x, y and z while maintaining relatively small lateral dimensions. Design and principle of operation of the instrument; Coarse positioning; Mechanism used for generating the oscillating motion of the tip for shear force feedback.


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