Noise elimination method using a transmission line for the diagnostics of radio frequency plasma

Shimizu, K.; Hallil, A.; Amemiya, H.
April 1997
Review of Scientific Instruments;Apr97, Vol. 68 Issue 4, p1730
Academic Journal
Focuses on a noise elimination using a transmission line for the diagnostics of radio frequency plasma. Development of a filter formed by a cascade connection of inverted L-type networks; Distortion free probe characteristics; Accurate determination of plasma parameters.


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