TITLE

Noise elimination method using a transmission line for the diagnostics of radio frequency plasma

AUTHOR(S)
Shimizu, K.; Hallil, A.; Amemiya, H.
PUB. DATE
April 1997
SOURCE
Review of Scientific Instruments;Apr97, Vol. 68 Issue 4, p1730
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Focuses on a noise elimination using a transmission line for the diagnostics of radio frequency plasma. Development of a filter formed by a cascade connection of inverted L-type networks; Distortion free probe characteristics; Accurate determination of plasma parameters.
ACCESSION #
4321242

 

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