A modified molecular beam instrument for the imaging of radicals interacting with surfaces during

McCurdy, Patrick R.; Bogart, K.H.A.; Dalleska, N.F.; Fisher, Ellen R.
April 1997
Review of Scientific Instruments;Apr97, Vol. 68 Issue 4, p1684
Academic Journal
Describes the design and characterization of an instrument employing molecular beam techniques and laser induced fluorescence for measuring the reactivity of gas phase radicals at the surface of a depositing film. Use of an inductively coupled plasma source to create a molecular beam; Measurement of the surface reactivity of SiH molecules.


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