TITLE

Equipment for in situ resistivity and x-ray diffraction studies during ion implantation at

AUTHOR(S)
Koniger, A.; Hammerl, C.; Zander, W.; Rauschenbach, B.; Stritzker, B.
PUB. DATE
November 1996
SOURCE
Review of Scientific Instruments;Nov96, Vol. 67 Issue 11, p3961
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents an instrument designed for comprehensive in-situ analysis of phase formation and transformation during the ion implantation process. Implanter end station with heatable helium-cryostat as a sample holder; Temperature range covered by the sample holder so that temperature can be varied during implantation or subsequent annealing.
ACCESSION #
4321032

 

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