Design and construction of a rapid thermal processing system for in situ optical measurements

Conrad, K.A.; Sampson, R.K.; Massoud, H.Z.; Irene, E.A.
November 1996
Review of Scientific Instruments;Nov96, Vol. 67 Issue 11, p3954
Academic Journal
Presents a study that described a rapid thermal processing system incorporating features that enable in situ optical measurements. System incorporating an in situ spectroscopic ellipsometer; Unusual features necessary for ellipsometry measurements; Applications in systems for other optical measurements.


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