Micro-fabricated piezoelectric cantilever for atomic force microscopy

Watanabe, Shunji; Fujii, Toru
November 1996
Review of Scientific Instruments;Nov96, Vol. 67 Issue 11, p3898
Academic Journal
Presents a study that successfully developed an atomic force microscope with a batch-fabricated silicon cantilever with a pyramidal stylus. High quality lead zirconate titanate piezoelectric thin film that allows displacement sensing and actuating; Use of a lever as an actuator for z feedback positioning for imaging of a compact disk pit.


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