A high gravity chemical vapor deposition apparatus

Abe, Yoshiyuki; Maizza, Giovanni; Sone, Noboru; Nagasak, Yuji; Suzuki, Tetsuya
November 1997
Review of Scientific Instruments;Nov97, Vol. 68 Issue 11, p4225
Academic Journal
Develops a high gravity centrifuge facility in which thin films can be produced. Enabling of high gravity materials processing; Production of bulk materials; Diamond thin films grown under high gravity; Direct current-plasma chemical vapor deposition method.


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