Microelectromechanical scanning probe instruments for array architectures

Miller, Scott A.; Turner, Kimberly L.; MacDonald, Noel C.
November 1997
Review of Scientific Instruments;Nov97, Vol. 68 Issue 11, p4155
Academic Journal
Discusses the design of a compact electrostatic actuator for out-of-plane actuation of a probe tip. Static deflections out of the plane of the substrate; Device consisting of a single crystal silicon tip on a torsional cantilever with out-of-plane interdigitated electrode capacitors.


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