TITLE

Application of a novel contactless conductivity sensor in chemical vapor deposition of aluminum

AUTHOR(S)
Ermakov, A.V.; Hinch, B.J.
PUB. DATE
March 1997
SOURCE
Review of Scientific Instruments;Mar97, Vol. 68 Issue 3, p1571
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a novel contactless method for conductivity sensing that utilizes a driving coil and two tunable and near resonant coils. Use of inexpensive electronic components and a variable radio frequency (rf) generator; Aluminum films that show a discrete jump in differential sheet conductivity associated with aluminum cluster coalescence during growth.
ACCESSION #
4320544

 

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