An apparatus for glancing incidence ion beam polishing and characterization of surfaces to

Wissing, M.; Holzwarth, M.; Simeonova, D.S.; Snowdon, K.J.
December 1996
Review of Scientific Instruments;Dec1996, Vol. 67 Issue 12, p4314
Academic Journal
Describes an instrument which combines a glancing incidence ion beam erosion system with a scanning tunneling and an atomic force microscope. Allowing the ion beam polishing and surface topographic characterization of samples under ultrahigh vacuum conditions; Vacuum system and vibration isolation; Scanning tunneling and atomic force microscopes.


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