TITLE

Wide range standard for scanning probe microscopy height calibration

AUTHOR(S)
Brodowsky, Hanna M.; Boehnke, Undine-C.; Kremer, Friedrich
PUB. DATE
December 1996
SOURCE
Review of Scientific Instruments;Dec1996, Vol. 67 Issue 12, p4198
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a method for height calibration of scanning probe microscopes (SPM). Previously calibrated piezo that is set in a SPM instead of a sample; Definite time-periodic elongation at a corresponding voltage that can serve as height standard; Method's tuneability in a wide range; How the method is exact to the limits of the SPM itself.
ACCESSION #
4320466

 

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