Laser patterning of Y-Ba-Cu-O thin-film devices and circuits

Sobolewski, Roman; Xiong, W.; Kula, W.; Gavaler, J.R.
January 1994
Applied Physics Letters;1/31/1994, Vol. 64 Issue 5, p643
Academic Journal
Investigates the electrical properties of yttrium-barium-copper-oxygen thin film devices and circuits using the laser-writing patterning technique. Characteristics of the patterning procedure; Comparison between oxygen-rich and oxygen-poor regions; Enumeration of test structures patterned by laser writing.


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