TITLE

Laser patterning of Y-Ba-Cu-O thin-film devices and circuits

AUTHOR(S)
Sobolewski, Roman; Xiong, W.; Kula, W.; Gavaler, J.R.
PUB. DATE
January 1994
SOURCE
Applied Physics Letters;1/31/1994, Vol. 64 Issue 5, p643
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the electrical properties of yttrium-barium-copper-oxygen thin film devices and circuits using the laser-writing patterning technique. Characteristics of the patterning procedure; Comparison between oxygen-rich and oxygen-poor regions; Enumeration of test structures patterned by laser writing.
ACCESSION #
4319565

 

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