TITLE

Surface cleaning of GaAs by in situ chemical beam etching

AUTHOR(S)
Chiu, T.H.; Tsang, W.T.; Williams, M.D.; Mendonca, C.A.; Dreyer, K.; Storz, F.G.
PUB. DATE
December 1994
SOURCE
Applied Physics Letters;12/26/1994, Vol. 65 Issue 26, p3368
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the effectiveness of etch cleaning by chemical beam etching process (CBET) in surface roughening mechanism. Provision of etch rate control by the process; Maintenance of CBET in two-dimensional fashion; Dependence of CBET on volatile species.
ACCESSION #
4319504

 

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