TITLE

Charging dynamics of integrated circuit passivation layer probe holes in the electron beam tester

AUTHOR(S)
Phang, J.C.H.; Sim, K.S.
PUB. DATE
December 1994
SOURCE
Applied Physics Letters;12/26/1994, Vol. 65 Issue 26, p3341
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the charges of probe-hole sidewall in silica passivation layer of integrated circuits. Effects of negative charges on local electric field; Charges of the probe hole sidewall on normal extraction field; Prevention of low energy secondary electrons by negative charging.
ACCESSION #
4319494

 

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