Surface scattering of x rays from InP (001) wafers

Li, J.H.; Cui, S.F.; Li, M.; Li, C.R.; Mai, Z.H.; Wang, Y.T.; Zhuang, Y.
December 1994
Applied Physics Letters;12/26/1994, Vol. 65 Issue 26, p3317
Academic Journal
Examines the surface morphology of sulfur- and iron-doped indium phosphide wafers. Influence of surface roughness on device quality; Introduction of height-height correlation length for rough surface; Sensitivity of scattering methods to the surface morphology.


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