High repetition rate operation of a long pulse excimer laser

Sato, Yukio; Inoue, Mitsuo; Haruta, Kenyu; Nagai, Haruhiko; Murai, Yutaka
February 1994
Applied Physics Letters;2/7/1994, Vol. 64 Issue 6, p679
Academic Journal
Demonstrates high-repetition rate operation of long pulse xenon chloride (XeCl) laser. Importance of high power output for excimer laser application; Proposal of a reverse voltage mode operation of spiker-sustainer circuit for average power lasers.


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