TITLE

High repetition rate operation of a long pulse excimer laser

AUTHOR(S)
Sato, Yukio; Inoue, Mitsuo; Haruta, Kenyu; Nagai, Haruhiko; Murai, Yutaka
PUB. DATE
February 1994
SOURCE
Applied Physics Letters;2/7/1994, Vol. 64 Issue 6, p679
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates high-repetition rate operation of long pulse xenon chloride (XeCl) laser. Importance of high power output for excimer laser application; Proposal of a reverse voltage mode operation of spiker-sustainer circuit for average power lasers.
ACCESSION #
4319382

 

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