Effect of superlattice layer elastic moduli on hardness

Shinn, M.; Barnett, S.A.
January 1994
Applied Physics Letters;1/3/1994, Vol. 64 Issue 1, p61
Academic Journal
Examines the structure and hardness of epitaxial V[sub 0.6]Nb[sub 0.4]N/NbN superlattices. Deposition of the superlattices on magnesium oxide(100) by reactive sputtering; Assessment of the superlattice composition modulation; Measurement of titanium nitride/niobium nitride samples.


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