TITLE

Open air deposition of SiO[sub 2] film from a cold plasma torch of

AUTHOR(S)
Inomata, Kiyoto; Hyunkwon Ha; Chaudhary, Khaliq A.; Koinuma, Hideomi
PUB. DATE
January 1994
SOURCE
Applied Physics Letters;1/3/1994, Vol. 64 Issue 1, p46
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the application of an atmospheric pressure cold plasma torch to the deposition of silicon dioxide thin films. Decomposition of tetramethoxylsilane; Generation of the radio frequency plasma beam; Impact of plasma hydrogen admixing on the film structure and properties.
ACCESSION #
4319351

 

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