Force sensing microcantilever using sputtered zinc oxide thin film

Itoh, T.; Suga, T.
January 1994
Applied Physics Letters;1/3/1994, Vol. 64 Issue 1, p37
Academic Journal
Develops a force sensing microcantilever with sputtered zinc oxide thin film sandwiched electrodes. Change of the resistance between the electrodes; Determination of the cantilever static deflection; Application of the cantilever to both dynamic and static scanning force microscope.


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