Production of large diameter microwave plasma using an annular slot antenna

Ikushima, Takayuki; Okuno, Yoshihiro; Fujita, Hiroharu
January 1994
Applied Physics Letters;1/3/1994, Vol. 64 Issue 1, p25
Academic Journal
Proposes a production method for a large diameter microwave plasma without magnetic coils. Use of annular slot antenna in generating high density plasma; Optimum arrangement of components in the device; Observation of the plasma with two electron temperatures.


Related Articles

  • NCCA technical manual available.  // Appliance Manufacturer;May97, Vol. 45 Issue 5, p34 

    Focuses on a revised and updated manual released by the National Coil Coaters Association (NCCA). Information provided by the manual; How to avail the manual.

  • Kinky characters. Seife, Charles // New Scientist;01/31/98, Vol. 157 Issue 2119, p12 

    Announces that mathematicians have found out what causes telephone cords to coil, which may help biologist to understand how strings of bacteria twist themselves into helical fibres. What procedure was used; Comments from Neil Mendelson, a biologist at the University of Arizona; What the...

  • NCCA names officers, award winners.  // Industrial Paint & Powder;Jun96, Vol. 72 Issue 6, p7 

    Reports on the National Coil Coaters Association's appointment of officers and awarding of winners of the Annual Design Showcase Awards sponsored by the association. Names of appointed officers and their positions; Awardees.

  • Qualifying prepaint. Babyak, Richard J. // Appliance Manufacturer;Nov94, Vol. 42 Issue 11, p39 

    Reports on the National Coil Coaters Association's issuance of an instructional booklet called `Qualifying a Prepaint Product.' Topics.

  • Coated coil winning converts. Babyak, Richard J. // Appliance Manufacturer;Nov93, Vol. 41 Issue 11, p34 

    Reports on the use of coated coil by heating, ventilation and air conditioning manufacturing plants. Barriers to conversion from a hot-dip galvanized with a polyester coating to coated coil; Advantages of coated coil; Other markets.

  • Control of diamond film microstructure by Ar additions to Ch4/H2 microwave plasmas. Zhou, D.; Gruen, D.M.; Qin, L.C.; McCauley, T.G.; Krauss, A.R. // Journal of Applied Physics;8/15/1998, Vol. 84 Issue 4, p1981 

    Investigates transition from microcrystalline to nanocrystalline diamond films which were grown from Ar/H2/Ch4 microwave plasmas. Revelation of the cross-section and plan-view micrographs of scanning electron microscopy; How the microcrystalline grain size and columnar growth have been observed;...

  • On the magnetic field of rectangular coils. Briguet, A.; Chankji, J. // Review of Scientific Instruments;Aug1985, Vol. 56 Issue 8, p1626 

    A derivation of the magnetic field, created by rectangular single-turn coils, is achieved with the aid of magnetic scalar potential. The transformation properties of spherical harmonics under rotation permit one to analyze the magnetic field of a system of several coils. Application to a four,...

  • Using AC coils on DC power. Sheahan, Mary Kay // CEE News;Nov2000, Vol. 52 Issue 12, p28N 

    Presents step-by-step instructions on how to use AC coils on DC power, an alternative to rewinding AC coils for operation on DC circuits. Taking measurements; Making calculations; Bench testing.

  • A high inductance kHz resonator with a quality factor larger than 106. Falferi, P.; Cerdonio, M.; Franceschini, L.; Macchietto, R.; Vitale, S.; Zendri, J. P. // Review of Scientific Instruments;Sep94, Vol. 65 Issue 9, p2916 

    Electrical LC resonators with superconducting coils of ≈3.5 H inductance, operating in the frequency range 250-1500 Hz with quality factors up to Q ≈ 1.6×10[sup 6] are presented here. The coil has a reduced, < 100 pF, stray capacitance and is housed in a superconducting case....


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics