TITLE

Observation of open-ended stacking fault tetrahedra in Si[sub 0.85]Ge[sub 0.15] grown on

AUTHOR(S)
Howard, David J.; Bailey, William E.; Paine, David C.
PUB. DATE
November 1993
SOURCE
Applied Physics Letters;11/22/1993, Vol. 63 Issue 21, p2893
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the epitaxial growth of Si[sub 0.83]Ge[sub 0.15] thin films by rapid thermal chemical vapor deposition on patterned and planar silicon surfaces. Lithographic patterning and anisotropic etching of the substrates; Use of cross-section and plan-view transmission electron microscopy; Presence of open-ended stacking fault tetrahedra on the films.
ACCESSION #
4319302

 

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