Motion of ions in an electron cyclotron resonance plasma

Kohler, W.E.; Romheld, M.; Seebock, R.J.; Skaberna, S.
November 1993
Applied Physics Letters;11/22/1993, Vol. 63 Issue 21, p2890
Academic Journal
Examines the motion of ions emerging from an electron-cyclotron-resonance plasma source. Calculation of trajectories by solving the ion equations of motion in a divergent magnetic field and an electrostatic longitudinal accelerating field; Analysis of the propagation of the ion distribution function; Reason for the distribution broadening spatial profile.


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