Growth of diamond films: General correlation between film morphology and plasma emission spectra

Balestrino, G.; Marinelli, M.; Milani, E.; Paoletti, A.; Pinter, I.; Tebano, A.; Paroli, P.
February 1993
Applied Physics Letters;2/22/1993, Vol. 62 Issue 8, p879
Academic Journal
Investigates the correlation between the morphology of diamond thin film and features of plasma emission spectra. Growth of diamond film by plasma enhanced chemical vapor deposition; Link between carbon hydroxide emission line and diamond quality; Effect of increased of chlorine gas concentration on diamond film quality.


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