TITLE

Atomic resolution with an atomic force microscope using piezoresistive detection

AUTHOR(S)
Tortonese, M.; Barrett, R.C.; Quate, C.F.
PUB. DATE
February 1993
SOURCE
Applied Physics Letters;2/22/1993, Vol. 62 Issue 8, p834
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Formulates a piezoresistive detection scheme for atomic force microscopy (AFM). Use of a piezoresistive strain sensor embedded in the AFM cantilever; Fabrication of AFM cantilever using silicon micromachining techniques; Direct measurement of cantilever deflection from the resistance of the piezoelectric strain sensor.
ACCESSION #
4319216

 

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