TITLE

Zone-averaged method to minimize polarizer and analyzer imperfections in a phase-modulated

AUTHOR(S)
Chun-Yeol You; Sung-Chul Shin
PUB. DATE
September 1997
SOURCE
Review of Scientific Instruments;Sep97, Vol. 68 Issue 9, p3519
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the effects of polarizer and analyzer imperfections in a phase-modulated spectroscopic ellipsometer adopting a photoelastic modulator. Introduction of Jones matrices having off-diagonal elements to represent the imperfections of the polarizer and analyzer; Effects of the imperfections to the first-order approximation.
ACCESSION #
4303441

 

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