A transmission x-ray microscope based on secondary-electron imaging

Watts, R.N.; Liang, S.; Levine, Z.H.; Lucatorto, T.B.; Polack, F.; Scheinfein, M.R.
September 1997
Review of Scientific Instruments;Sep97, Vol. 68 Issue 9, p3464
Academic Journal
Presents the design for a transmission x-ray microscope with 20 nm transverse spatial resolution. Analysis of the microscope's electron-optical performance based on the evaluation of Gaussian focusing properties; Electron optical properties of the microscope; Preliminary experimental results using a cesium iodide photocathode.


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