TITLE

Noninvasive probing of high frequency signal in integrated circuits using electrostatic force

AUTHOR(S)
Hong, J.W.; Khim, Z.G.; Hou, A.S.; Park, Sang-il
PUB. DATE
December 1997
SOURCE
Review of Scientific Instruments;Dec1997, Vol. 68 Issue 12, p4506
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on a noninvasive high speed voltage sampling technique by using atomic force microscope. Measurements of signals with frequencies far above the mechanical resonance frequency of the cantilever; Increase of the sensitivity and stability of the signal detection; Modulation of the probing pulse; Sensing of voltage signals through a passivation layer.
ACCESSION #
4302393

 

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