TITLE

Shear-force detection based on an external cavity laser interferometer for a compact scanning

AUTHOR(S)
Pfeffer, M.; Lambelet, P.; Marqius-Weible, F.
PUB. DATE
December 1997
SOURCE
Review of Scientific Instruments;Dec1997, Vol. 68 Issue 12, p4478
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a compact near field optical microscope module with shear-force detection based on an external cavity laser interferometer. Minimal sensitivity towards thermal and mechanical perturbations; Detection of minimum displacement with a large working distance.
ACCESSION #
4302388

 

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