Gas-discharge neutralizer for ion-beam system

Bizyukov, A.A.; Kashaba, A.Y.; Sereda, K.N.
December 1997
Review of Scientific Instruments;Dec1997, Vol. 68 Issue 12, p4415
Academic Journal
Presents the design and operation of a gas-discharge neutralizer of positive ion beams. Types of the discharge inside the neutralizer; Role of the magnetron regime in the achievement of full ion beam compensation.


Related Articles

  • Simulation of reactive ion etching pattern transfer. Shaqfeh, Eric S. G.; Jurgensen, Charles W. // Journal of Applied Physics;11/15/1989, Vol. 66 Issue 10, p4664 

    Deals with a study which described a model that stimulates etching profiles and process latitudes in glow-discharge bombardment-induced reactive-etching processes. Information on glow-discharge pattern-transfer processes; Methodology of the study; Results and discussion.

  • Energy distribution of the compact microwave ion source for extremely low voltage ion extraction. Gotoh, Y.; Nakajima, K.; Hagiwara, T.; Tsuji, H.; Ishikawa, J. // Review of Scientific Instruments;Feb2002, Vol. 73 Issue 2, p758 

    The energy distribution of the ion beam extracted from the compact microwave ion source for extremely low voltage ion extraction was measured with Ar and CO as a discharge gas. The energy distribution was measured by the retarding field method, and changes with respect to the change in gas...

  • Influence on the extracted ion beam of gas added to the MEVVA discharge (abstract)a). Spädtke, P.; Emig, H.; Wolf, B. H.; Oks, E. // Review of Scientific Instruments;Apr94, Vol. 65 Issue 4, p1262 

    The presence of background gas in the discharge chamber of the MEVVA source influences the extracted beam. A strong influence Of the background gas pressure in the arc region on the total extracted beam current and on the charge state distribution of the metallic ions have been observed....

  • Multiplate pseudospark ion sources. Jiang, X. L.; Song, Z. M. // Review of Scientific Instruments;Apr94, Vol. 65 Issue 4, p1348 

    A variety of intense pulsed ion beams has been generated by the multiplate pseudospark chamber with an axially symmetric, high voltage gas discharge at low pressure of about 10 Pa. The fundamentals of this new type of ion source have been discussed in this paper. The field escalation effect has...

  • A hollow cathode ion source as an electron-beam ion source injector for metallic elements. Visentin, B.; Harrault, F.; Gobin, R.; Leroy, P. A. // Review of Scientific Instruments;Apr94, Vol. 65 Issue 4, p1129 

    A hollow cathode ion source (HCIS) has been developed in our Laboratory to produce, by cathodic sputtering in a glow discharge, a one charge metallic ion beam. This source is used as an injector for the electron-beam ion source (EBIS) Dioné that produce, after ion stripping, a highly charged...

  • Multiple steady states in a radio frequency chlorine glow discharge. Aydil, Eray S.; Economou, Demetre J. // Journal of Applied Physics;1/1/1991, Vol. 69 Issue 1, p109 

    Presents a study that observed multiple steady states in a radio frequency (rf) glow discharge in a parallel plate radial flow reactor. Applications of glow discharges; Factor affecting the ion bombardment energy distribution in an rf; Explanation for the occurrence of instabilities and...

  • Experimental investigation of high temperature high voltage thermionic diode for the space power nuclear reactor. Onufriyev, Valery. V. // AIP Conference Proceedings;2001, Vol. 552 Issue 1, p1136 

    It is well known that the rise of arc from the dense glow discharge is connected with the thermion and secondary processes on the cathode surface (Granovsky, 1971; Leob, 1953; Engel, 1935). First model of breakdown of the cathode layer is connected with the increase of the cathode temperature in...

  • Generation of a homogeneous plasma in a glow discharge with a hollow anode and a wide-aperture hollow cathode. Gavrilov, N. V.; Emlin, D. R.; Nikulin, S. P. // Technical Physics Letters;Jun99, Vol. 25 Issue 6, p498 

    The principles for designing electrode systems for sources of ion beams of large cross section on the basis of a glow discharge are considered, and a system with combined magnetic and electrostatic confinement of the fast electrons in a wide-aperture hollow cathode and the generation of an...

  • Generation of an ion beam in a glow-discharge source. Sikharulidze, G. G. // Instruments & Experimental Techniques;Mar2009, Vol. 52 Issue 2, p249 

    A mechanism of ion extraction from a glow-discharge ion source based on a hollow cathode and used for elemental analysis of solids, is considered Experiments have shown that two oppositely directed ion flows are formed from ions produced in the region of negative glow-discharge fluorescence. One...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics