TITLE

Improved uniformity of multielement thin films prepared by off-axis pulsed laser deposition

AUTHOR(S)
Cillessen, J.F.M.; de Jong, M.J.M.; Croize, X.
PUB. DATE
September 1996
SOURCE
Review of Scientific Instruments;Sep96, Vol. 67 Issue 9, p3229
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the improved uniformity of a multielement thin films prepared by off-axis pulsed laser deposition using a heater design. Components of the heater; Advantage of the system; Application of the heater for the deposition of multielement films; Modeling of the thickness profile.
ACCESSION #
4302113

 

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