A soft x-ray standing wave measurement system for analyzing compound semiconductor surfaces

Sugiyama, M.; Maeyama, S.; Oshima, M.
September 1996
Review of Scientific Instruments;Sep96, Vol. 67 Issue 9, p3182
Academic Journal
Describes a soft x-ray standing wave (XSW) measurement system for analyzing compound semiconductor surfaces prepared by molecular beam epitaxy. Components of the system; Transfer of the samples prepared by MBE to the analysis chamber through ultrahigh vacuum; Suitability of the goniometer for soft-XSW triangulation studies.


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