Depth profile of implanted species with a detector telescope

Avasthi, D.K.; Kabiraj, D.; Jain, A.; Mehta, G.K.
September 1996
Review of Scientific Instruments;Sep96, Vol. 67 Issue 9, p3092
Academic Journal
Investigates the depth profile of implanted species of light mass elements with a detector telescope. Description of the elastic recoil detection analysis (ERDA) technique; Reasons why the technique can lead to misleading results; Accurate profiling of implanted specimen.


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