TITLE

Fifty centimeter ion beam source[sup a)]

AUTHOR(S)
Hayes, A.V.; Kanarov, V.; Vidinsky, B.
PUB. DATE
April 1996
SOURCE
Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1638
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes a 50 centimeter ion source and its industrial applications. Description of the ion beam processing system; Illustration of the application of the source.
ACCESSION #
4302064

 

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