Fifty centimeter ion beam source[sup a)]

Hayes, A.V.; Kanarov, V.; Vidinsky, B.
April 1996
Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1638
Academic Journal
Describes a 50 centimeter ion source and its industrial applications. Description of the ion beam processing system; Illustration of the application of the source.


Related Articles

  • Uniform beam profiles of 5 cm convex gridded ion beam source. Koh, S.K.; Song, S.K.; Choi, W.K.; Jung, H.-J.; Gontcharov, L. // Review of Scientific Instruments;Nov95, Vol. 66 Issue 11, p5379 

    Characterizes a Kaufman-type five-centimeter convex gridded ion-beam source in terms of angle-resolved ion-beam current density and beam uniformity at various discharge currents, electromagnet currents, and acceleration potentials. Origin of the technology used in the gridded ion source;...

  • Ion divergence generated by nonuniform current density of intense ion beams. Slutz, S. A. // Physics of Fluids B: Plasma Physics;Aug92, Vol. 4 Issue 8, p2645 

    Large electric and magnetic fields are generated by the space charge and current of intense ion beams. These fields induce ion divergence if the beam current density is not uniform. Within the accelerating region the deflection of ions due to the electric fields is much larger than ion...

  • A combined thermal dissociation and electron impact ionization source for radioactive ion beam... Alton, G.D.; Williams, C. // Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1626 

    Describes a combined thermal dissociation and electron impact ionization source for radioactive ion beam (RIB) generation. Dilution of the intensity of the species of interest for RIB; Conception of an ion source that combines molecular dissociation properties of thermal dissociator and high...

  • A high-efficiency positive (negative) surface ionization source for radioactive ion beam. Alton, G.D.; Mills, G.D. // Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1630 

    Describes a high efficiency positive (negative) surface ionization source for radioactive beam. Theory of positive ion formation; Theory of negative surface ionization; Electropositive adsorbate-induced work function changes.

  • Effusive flow delay times for gaseous species in a compact rf ion source[sup a)]. Welton, R.F.; Piotrowski, A.; Alton, G.D.; Murray, S.N. // Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1670 

    Discusses radio frequency ion source developed and evaluated as a potential candidate for use in generating radioactive ion beams (RIB). Development of complementary experimental and computation techniques; Characterization of the effusive delay times for the stable counterparts of various...

  • Mini rf-driven ion sources for focused ion beam systems. Jiang, X.; Ji, Q.; Chang, A.; Leung, K. N. // Review of Scientific Instruments;Apr2003, Vol. 74 Issue 4, p2288 

    Mini rf-driven ion sources with 1.2 cm and 1.5 cm inner chamber diameter have been developed at Lawrence Berkeley National Laboratory. Several gas species have been tested including argon, krypton, and hydrogen. These mini ion sources operate in inductively coupled mode and are capable of...

  • Ion energy spread and current measurements of the rf-driven multicusp ion source. Lee, Y.; Gough, R.A.; Kunkel, W.B.; Leung, K.N.; Perkins, L.T.; Pickard, D.S.; Sun, L.; Vujic, J.; Williams, M.D.; Wutte, D. // Review of Scientific Instruments;Mar97, Vol. 68 Issue 3, p1398 

    Focuses on the use of a radio frequency (rf)-driven multicusp ion source for axial energy spread and useful beam current of positive ion beams. Induction discharge; Extractable beam current of the rf-driven source; Comparison with filament-discharge sources; Positive hydrogen ion beam current...

  • Ion sources for ion beam assisted thin-film depositiona). Ensinger, W. // Review of Scientific Instruments;Nov92, Vol. 63 Issue 11, p5217 

    Ion beam assisted deposition (IBAD) is a coating technique which combines a thin-film deposition method such as evaporation with irradiation by highly energetic ions from an ion source. Application of an ion source and a vapor source which are operated independently of each other render the IBAD...

  • Development of a microwave ion source for negative oxygen ion beam production. Tanaka, M.; Miyake, K.; Sakudo, N.; Kobayashi, K.; Ohkawa, H. // Review of Scientific Instruments;Oct95, Vol. 66 Issue 10, p4911 

    Investigates the development of a microwave ion source for negative oxygen ion beam production. Employment of a double plasma cell system in order to increase efficiency of negative oxygen ion production; Generation of a high density plasma in the first plasma cell; Generation of oxygen...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics