Suface plasma source to generate high-brightness H[sup -] beams for ion projection

Dudnikov, V.G.; Derevyankin, G.E.; Kovalevsky, D.V.; Savkin, V.Ya.; Sokolovsky, E.A.; Guharay, S.K.
April 1996
Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1614
Academic Journal
Describes a surface plasma source with Penning-type electrodes developed to generate hydrogen beams for ion projection lithography applications. Maximum beam current density; Preliminary measurements.


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