TITLE

Suface plasma source to generate high-brightness H[sup -] beams for ion projection

AUTHOR(S)
Dudnikov, V.G.; Derevyankin, G.E.; Kovalevsky, D.V.; Savkin, V.Ya.; Sokolovsky, E.A.; Guharay, S.K.
PUB. DATE
April 1996
SOURCE
Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1614
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes a surface plasma source with Penning-type electrodes developed to generate hydrogen beams for ion projection lithography applications. Maximum beam current density; Preliminary measurements.
ACCESSION #
4302058

 

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