Multiple hollow-cathode vacuum-ultraviolet plasma source excited by pulsed glow discharge

Suzuki, Setsuo; Noda, Etsuo
April 1996
Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1517
Academic Journal
Describes a multiple hollow-cathode vacuum-ultraviolet plasma source excited by pulsed glow discharge. Maintenance of the stable output; Measurements of radiant illumination; Decrease in the peak radiant illumination.


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