TITLE

Multiple hollow-cathode vacuum-ultraviolet plasma source excited by pulsed glow discharge

AUTHOR(S)
Suzuki, Setsuo; Noda, Etsuo
PUB. DATE
April 1996
SOURCE
Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1517
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes a multiple hollow-cathode vacuum-ultraviolet plasma source excited by pulsed glow discharge. Maintenance of the stable output; Measurements of radiant illumination; Decrease in the peak radiant illumination.
ACCESSION #
4302041

 

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