TITLE

Control of plasma parameters in sheet-shaped electron cyclotron resonance heating plasma

AUTHOR(S)
Shibata, Kanetoshi; Yugami, Noboru; Nishida, Yasushi; Miyazaki, Tadaomi
PUB. DATE
April 1996
SOURCE
Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1502
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the production and parameter control techniques of sheet-shaped cyclotron resonance heating (ECRH) plasma. Supplementing radio frequency by the sheet-shaped electron cyclotron plasma; Application to the material processing in well defined manner.
ACCESSION #
4302039

 

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