A three-axis micropositioner for ultrahigh vacuum use based on the intertial slider principle

Erlandsson, R.; Olsson, L.
April 1996
Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1472
Academic Journal
Presents a three-dimensional micropositioner using the inertial slider principle which is used to position an optical fiber in an atomic force microscope. Realization of the sideways and vertical motions; Operation in a baked ultrahigh vacuum system; Range of the measured speed.


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