TITLE

An impedance based non-contact feedback control system for scanning probe microscopes

AUTHOR(S)
Lee, Mark; McDaniel, E.B.; Hsu, J.W.P.
PUB. DATE
April 1996
SOURCE
Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1468
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes a non-contact, non-optical distance feedback control system for scanning probe microscopes that detects the surface damping of a vibrating probe. Derivation of the feedback signal; Incorporation of an arbitrary-impedance bridge by the system; Improvement of the reliability.
ACCESSION #
4302032

 

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