TITLE

Vacuum compatible high-sensitive Kelvin probe force microscopy

AUTHOR(S)
Kikukawa, Atsushi; Hosaka, Sumio; Imura, Ryo
PUB. DATE
April 1996
SOURCE
Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1463
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a vacuum compatible Kelvin probe force microscopy (KPFM). Overcoming of the difficulties of operating KPFM; Improvement of the potential measurement sensitivity; Observation of a silicon wafer whose surface is partially doped with arsenic by ion implantation.
ACCESSION #
4302031

 

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