Vacuum compatible high-sensitive Kelvin probe force microscopy

Kikukawa, Atsushi; Hosaka, Sumio; Imura, Ryo
April 1996
Review of Scientific Instruments;Apr96, Vol. 67 Issue 4, p1463
Academic Journal
Presents a vacuum compatible Kelvin probe force microscopy (KPFM). Overcoming of the difficulties of operating KPFM; Improvement of the potential measurement sensitivity; Observation of a silicon wafer whose surface is partially doped with arsenic by ion implantation.


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