Microwave compatible electromagnetic valve for plasma deposition studies

Sanner, Mark A.; Park, Jin Y.
October 1996
Review of Scientific Instruments;Oct96, Vol. 67 Issue 10, p3675
Academic Journal
Discusses a microwave compatible electromagnetic valve capable of discharging saturated vapors in vacuum for shock wave formation and subsequent pulsed plasma deposition. Design and construction; Vapor discharges of the electromagnetic valve; Theoretical gas dynamics.


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