New doser for chemical vapor deposition of low vapor-pressure solid precursors

Serghini-Monim, S.; Coatsworth, L.L.; Norton, P.R.; Puddephatt, R.J.
October 1996
Review of Scientific Instruments;Oct96, Vol. 67 Issue 10, p3672
Academic Journal
Describes an ultrahigh vacuum compatible device to maximize the volatilization of low vapor-pressure precursors used in chemical vapor deposition processes while minimizing their dissociation. Doser design description and performance; Use of the doser for multicomponent film deposition and for the injection of organometallic complexes into a plasma.


Related Articles

  • In situ four-point conductivity and Hall effect apparatus for vacuum and controlled atmosphere measurements of thin film materials. Moulzolf, S. C.; Frankel, D. J.; Lad, R. J. // Review of Scientific Instruments;Jun2002, Vol. 73 Issue 6, p2325 

    An ultrahigh vacuum (UHV) chamber equipped with a fixture for in situ four-point Van Der Pauw conductivity and Hall effect measurements has been constructed and attached to a multichamber thin film synthesis and characterization system. The combined systems allow for film synthesis and...

  • Reusable ultrahigh vacuum viewport bakeable to 240 °C. Cox, S. G.; Griffin, P. F.; Adams, C. S.; DeMille, D.; Riis, E. // Review of Scientific Instruments;Jun2003, Vol. 74 Issue 6, p3185 

    We have developed a removable and bakeable viewport for UHV applications. The viewport consists of a modified blank Conflat flange; a ring of flux-free solder to form a vacuum seal; a viewport window; a clamping flange, and conical disk springs. We have cyclically baked viewports up to 240 °C...

  • Ultrahigh-vacuum apparatus for the preparation of thin metal bicrystals containing grain boundaries. Milkove, K. R.; Sass, S. L. // Review of Scientific Instruments;Nov86, Vol. 57 Issue 11, p2812 

    An ultrahigh-vacuum apparatus for the preparation of thin metal bicrystals containing controlled grain boundaries at their midplane is described. The deposition of the thin epitaxial single-crystal films and their hot pressing together to produce the bicrystal in situ can be carried out using...

  • Modification of a high vacuum, crossed molecular beam scattering system to perform angle-resolved... Yoshikawa, Hiroshi; Ohashi, Haruhiko; Tabayashi, Kiyohiko; Suzui, Mitsukazu; Horigome, Toshio; Hayakawa, Kazuo; Kato, Shinji; Shobatake, Kosuke; Ito, Koji; Fujimoto, Tetsuo // Review of Scientific Instruments;Mar99, Vol. 70 Issue 3, p1806 

    Discusses the modification of a molecular beam apparatus formerly used for crossed molecular beam chemiluminescence experiments under high vacuum conditions. Ultrahigh vacuum apparatus with a rotatable mass spectrometer detector; Electron bombardment ionizer; Study of the molecular surface...

  • Simple adapter for a closed-loop helium cryostat in ultrahigh-vacuum application. Milun, M.; Pervan, P.; Valla, T.; Dukic, P. // Review of Scientific Instruments;Dec1991, Vol. 62 Issue 12, p3116 

    An adapter is described that enables one to use a nonbakable closed-loop helium cryostat in ultrahigh-vacuum experiments. The adapter is fully bakable, simple and cheap, and has been designed specifically for systems where a sample holder is mounted to an x,y,z-rotational manipulator. During...

  • Ultrahigh-vacuum furnace for sintering studies of ultrafine ceramic particles. Bonevich, John E.; Teng, Mao-Hua; Johnson, D. Lynn; Marks, Laurence D. // Review of Scientific Instruments;Dec1991, Vol. 62 Issue 12, p3061 

    An Ultrahigh-vacuum (UHV) furnace has been designed and constructed for the purpose of investigating the sintering behavior of ultrafine ceramic particles. The UHV furnace has three main chambers for particle production, sintering, and collection with additional facilities for an UHV transfer...

  • An ultrahigh vacuum goniometer system equipped with a Si(Li) array detector for soft x-ray standing-wave experiments. Maeyama, Satoshi; Kawamura, Tomoaki; Oshima, Masaharu // Review of Scientific Instruments;Dec1991, Vol. 62 Issue 12, p2976 

    An ultrahigh vacuum compatible goniometer system has been developed for use in angle-scan standing-wave experiments in a soft x-ray region. This system uses a horizontal two-axis (theta and two-theta) goniometer for the x-ray diffractometer. The theta axle used for sample rotations is inserted...

  • Ultrahigh vacuum high-pressure reaction system for 2-infrared 1-visible sum frequency generation studies. Kung, K. Y.; Chen, P.; Wei, F.; Rupprechter, G.; Shen, Y. R.; Somorjai, G. A. // Review of Scientific Instruments;Mar2001, Vol. 72 Issue 3, p1806 

    We designed an ultrahigh vacuum high-pressure (UHVHP) reaction system for in situ sum frequency generation studies. This system allows for pressure (10[sup -9] Torr-1 atm), and temperature (150-1100 K) dependent investigation of adsorbates on single crystals or polycrystalline foils and of...

  • Design parameters for differentially pumped rotating platforms. Columbia, M. R.; Thiel, P. A. // Review of Scientific Instruments;Feb1987, Vol. 58 Issue 2, p309 

    We have constructed a large differentially pumped platform for use in ultrahigh vacuum. The design utilizes spring-loaded Teflon seals to permit differential pumping between two horizontal stainless-steel disks. This allows the rotation of the upper disk and the items built into it directly...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics