Ion-beam deceleration characteristics of a high-current, mass-separated, low-energy ion beam

Shimizu, S.; Sasaki, N.; Ogata, S.; Tsukakoshi, O.
October 1996
Review of Scientific Instruments;Oct96, Vol. 67 Issue 10, p3664
Academic Journal
Studies the ion beam deceleration characteristics of a high-current, mass-separated, low-energy ion beam deposition system that utilizes an acceleration-deceleration method. Convergence of the ion beam in the deceleration system required for suppressing the blowup of the ion beam due to the space charge effect; Design of the deceleration system.


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