Characteristics of AuSi liquid metal alloy ion source with coupling extractor electrodes

Higuchi-Rusli, Ronnie H.
October 1996
Review of Scientific Instruments;Oct96, Vol. 67 Issue 10, p3501
Academic Journal
Investigates the characteristics of liquid metal alloy ion source with single and coupling extractor electrodes in the focused ion beam machine and in the vacuum test bed system equipped with quadrupole mass spectrometer Details system configuration and ion source design; Single and coupling extractors characteristics; Stability of coupling extractor electrode.


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