TITLE

A broad beam cold cathode Penning ionization gauge ion source for ion-beam-assisted deposition

AUTHOR(S)
Yusheng Rao; Jiannan Wu; Taoguang Xu
PUB. DATE
October 1996
SOURCE
Review of Scientific Instruments;Oct96, Vol. 67 Issue 10, p3494
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on a broad beam cold cathode Penning ionization gauge ion source for ion-beam-assisted deposition. Description of the ion source; Role of the magnetic field in discharge; Benefits of the high operation pressure in setting up a stable discharge.
ACCESSION #
4295484

 

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