TITLE

High sensitivity mass spectrometer system for contaminant measurement in high purity gases

AUTHOR(S)
Ma, Y.; Liu, B.Y.H.; Lee, H.S.; Mauersberger, K.; Morton, J.
PUB. DATE
October 1996
SOURCE
Review of Scientific Instruments;Oct96, Vol. 67 Issue 10, p3465
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on a high sensitivity mass spectrometer beam system using a double focusing sector analyzer and an electron impact ion source for contaminant measurement in high purity gases. Description of the mass spectrometer beam system; System's linearity, sensitivity and detection capacity; System performance.
ACCESSION #
4295479

 

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