High sensitivity mass spectrometer system for contaminant measurement in high purity gases

Ma, Y.; Liu, B.Y.H.; Lee, H.S.; Mauersberger, K.; Morton, J.
October 1996
Review of Scientific Instruments;Oct96, Vol. 67 Issue 10, p3465
Academic Journal
Reports on a high sensitivity mass spectrometer beam system using a double focusing sector analyzer and an electron impact ion source for contaminant measurement in high purity gases. Description of the mass spectrometer beam system; System's linearity, sensitivity and detection capacity; System performance.


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