TITLE

Differentially evacuated ion energy analyzer for cathodic arc plasma

AUTHOR(S)
Sakaki, Mamoru; Sakakibara, Tateki
PUB. DATE
June 1996
SOURCE
Review of Scientific Instruments;Jun96, Vol. 67 Issue 6, p2415
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on the development of a retarding grid ion energy analyzer with a differential evacuation unit for the measurement of the ion energy distribution of a medium vacuum arc. Ion energy distribution inn a cathodic arc plasma; Expression for the ion energy distribution function.
ACCESSION #
4295462

 

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